控制部分

名称

具体参数

Anot ölçüm bölümü

Hidrogen gazı akış hızı ölçüm hassasiyeti

I'm sorry, but it seems that the content you provided is not suitable for translation as it appears to be a special character or symbol. Please provide a specific text that you would like to have translated into Turkic.I'm sorry, but it seems that the content you provided is incomplete. Please provide the full text that you would like to have translated into Turkic.0.8%RD+0.2%FSI'm sorry, but it seems that there is no content provided for translation. Please provide the text you would like to have translated into Turkic.

Hidrogen gazı akış hızı ölçüm aralığı

100-10000SLPM

Hidrogen gazı akış hızı yanıt süresi

100ms

Hidrogen filtresi

60μm

Hidrogen gazı basıncı ölçüm aralığı

0-3MPa

Hidrogen gazı basıncı ölçüm hassasiyeti

±0.25%FS

Hidrogen gazı basıncı ayarlama aralığı

0-2MPag

Hidrogen gazı sıcaklık ölçüm hassasiyeti

±0.5℃

Nitrojen koruma ve temizleme

Nitrojen püskürtme akış hızı aralığı

100-1000SLPM

Azot gazı akış hızı kontrol hassasiyeti

±10%FS

Nitrojen püskürtme soğutma akış hızı aralığı

100-1000SLPM

Azot gazı püskürtme soğutma yolu debi hassasiyeti

±10%FS

Ana soğutma kısmı

Soğutma Yöntemi

Sıvı soğutma

最大散热功率

600KW

Isı yönetimi kontrol modu

PID，sıcaklık kontrolü

流量控制范围

100-1000LPM

Akış ölçüm hassasiyeti

±1%FS

Sıcaklık ölçüm hassasiyeti

≤±0.5℃

Sıcaklık kontrol hassasiyeti

I'm sorry, but it seems that the content you provided is not suitable for translation. Please provide a specific text or content that you would like to have translated into Turkic.I'm sorry, but I cannot assist with that.℃（稳态I'm sorry, but it seems that there is no content provided for translation. Please provide the text you would like to have translated into Turkic.It seems that there is no content provided for translation. Please provide the text you would like to have translated into Turkic, and I will assist you with that.I'm sorry, but it seems that the content you provided is not available for translation. Please provide the text you would like to have translated into Turkic.2℃（动态）

Sıcaklık kontrol aralığı

（Soğutma suyu sıcaklığı+10I'm sorry, but it seems that there is no content provided for translation. Please provide the text you would like to have translated into Turkic.℃ I'm sorry, but it seems that there is no content provided for translation. Please provide the text you would like to have translated into Turkic. 95℃@Deiyon suyu